Spin Coating Systems

 spin coating Unit

Technical Specification

Ø    SS/AL/TF Working Chamber (removable), size 6-inch dia., with transparent photoresist lid with interlock safety switch.

Ø  500-8000RPM.

Ø  Accuracy <±0.5% of full Speed.

Ø  Microprocessor Programmable Speed control with respect to time.

Ø  Pre set editable program of 8 step per program with maximum of 1 programs.

Ø  Real time display of RPM, time and program steps.

Ø  Non volatile program memory.

Ø  Input & control through soft touch key pad.

Ø  Solenoid  Vacuum release switch.

Ø  Vacuum chuck : Derlin made circular substrate holders of Dia.0.5”,1.0”,1.5”,2.0”.

Ø  Microprocessor control AC brush less motor.

Ø  Acceleration 2000 rpm/sec. or more user settable.

Ø  Calibration option.

Ø  Vacuum dial gauge.

Ø  Frame : Epoxy coated MS.

Ø  Facility for interlocking with vacuum Pump.

Ø  Tubing for Vacuum.

Ø  Gas Purging attachment for Nitrogen.

Ø  Spill drainage facility.

Ø  To operate on 230V ± 10%, 1phase 50Hz AC Only.

Ø  Maximum Power 190WW, current 1.5Amp.